JPH02149757U - - Google Patents
Info
- Publication number
- JPH02149757U JPH02149757U JP5890889U JP5890889U JPH02149757U JP H02149757 U JPH02149757 U JP H02149757U JP 5890889 U JP5890889 U JP 5890889U JP 5890889 U JP5890889 U JP 5890889U JP H02149757 U JPH02149757 U JP H02149757U
- Authority
- JP
- Japan
- Prior art keywords
- electron beam
- crucible
- electron gun
- heating
- electron
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002994 raw material Substances 0.000 claims description 2
- 238000010894 electron beam technology Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 claims 2
- 230000001133 acceleration Effects 0.000 claims 1
- 238000007872 degassing Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 claims 1
- 238000001704 evaporation Methods 0.000 claims 1
- 238000007740 vapor deposition Methods 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Electron Sources, Ion Sources (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5890889U JPH069015Y2 (ja) | 1989-05-22 | 1989-05-22 | 蒸着用電子銃 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5890889U JPH069015Y2 (ja) | 1989-05-22 | 1989-05-22 | 蒸着用電子銃 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH02149757U true JPH02149757U (en]) | 1990-12-21 |
| JPH069015Y2 JPH069015Y2 (ja) | 1994-03-09 |
Family
ID=31584942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5890889U Expired - Lifetime JPH069015Y2 (ja) | 1989-05-22 | 1989-05-22 | 蒸着用電子銃 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069015Y2 (en]) |
-
1989
- 1989-05-22 JP JP5890889U patent/JPH069015Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH069015Y2 (ja) | 1994-03-09 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |